光刻胶单体及树脂
发布时间：2024-11-12
光刻胶单体及树脂\光刻胶单体及树脂\光刻胶单体及树脂
| 分类 | 中文名称 | 产品代号 | CAS号 | 纯度 | 单金杂 |
| 单体 | 对乙酰氧基苯乙烯 | pACS | 2628-16-2 | ≥99.5% | ≤1ppb |
| 对乙氧基乙氧基苯乙烯 | pEES | 157057-20-0 | ≥99.0% | ≤1ppb | |
| 对叔丁氧基苯乙烯 | pTBS | 95418-58-9 | ≥99.5% | ≤1ppb | |
| 丙烯酸叔丁酯 | TBA | 1663-39-4 | ≥99.5% | ≤1ppb | |
| 对羟基苯乙烯 | pHS | 2628-17-3 | ≥99.0% | ≤10ppb | |
| 对叔丁氧羰基苯乙烯 | T-BOC | 87188-51-0 | ≥99.0% | ≤10ppb | |
| 对氯苯乙烯 | pCST | 1073-67-2 | ≥99.5% | ≤10ppb | |
| 甲基丙烯酸甲酯 | MMA | 80-62-6 | ≥99.5% | ≤5ppb | |
| 树脂 | pHS:SM:TBA | 200808-68-0 | 60:20:20 | 12000±500 | 1.40±0.1 |
| pHS:SM:TBA | 60:20:20 | 18000±500 | 1.60±0.1 | ||
| pHS:SM:TBA | 60:20:20 | 24000±500 | 1.80±0.1 | ||
| pHS:SM:TBA | 60:20:20 | 30000±500 | 2.00±0.1 | ||
| pHS:SM:TBA | 60:25:15 | 14000±500 | 1.50±0.1 | ||
| pHS:SM:TBA | 60:25:15 | 16000±500 | 1.70±0.1 | ||
| pHS:SM:TBA | 60:25:15 | 18000±500 | 1.90±0.1 | ||
| pHS:SM:TBA | 65:15:20 | 11000±500 | 1.50±0.1 | ||
| pHS:SM:TBA | 65:15:20 | 16000±500 | 1.70±0.1 | ||
| pHS:SM:TBA | 65:15:20 | 21000±500 | 1.90±0.1 | ||
| pHS:SM:TBA | 65:20:15 | 14000±500 | 1.50±0.1 | ||
| pHS:SM:TBA | 65:20:15 | 22000±500 | 1.70±0.1 | ||
| pHS:SM:TBA | 65:20:15 | 30000±500 | 1.90±0.1 | ||
| pHS | 24979-70-2 | 100% | 9000±500 | ＜1.2 | |
| pHS | 100% | 12000±500 | |||
| pHS | 100% | 15000±500 | |||
| pHS:SM =85:15 | 24979-74-6 | 85:15 | 3000±500 | ||
| pHS:SM =85:15 | 85:15 | 4000±500 | |||
| pHS:SM =85:15 | 85:15 | 5000±500 | |||
| pHS:SM =80:20 | 80:20 | 3000±500 | |||
| pHS:SM =80:20 | 80:20 | 4000±500 | |||
| pHS:SM =80:20 | 80:20 | 5000±500 | |||
| pTBS | 95418-60-3 | 100% | 9000±500 | ||
| pTBS | 100% | 12000±500 | |||
| pTBS | 100% | 15000±500 | |||
| pTBS:SM =85:15 | 741674-84-0 | 85:15 | 3000±500 | ||
| pTBS:SM =85:15 | 85:15 | 4000±500 | |||
| pTBS:SM =85:15 | 85:15 | 5000±500 | |||
| pTBS:SM =80:20 | 80:20 | 3000±500 | |||
| pTBS:SM =80:20 | 80:20 | 4000±500 | |||
| pTBS:SM =80:20 | 80:20 | 5000±500 |
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- 三乙醇胺|电子级G3下一个：
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